Resumen de Physics-aware macromodels for MEMS switches

Aurel Sorin Lup, Gabriela Ciuprina, Daniel Ioan, Anton Duca, Alexandra Nicoloiu, Dan Vasilache

• The purpose of this paper is to propose a physics-aware algorithm to obtain radio frequency (RF)-reduced models of micro-electromechanical systems (MEMS) switches and show how, together with multiphysics macromodels, they can be realized as circuits that include both lumped and distributed parameters