Physics-aware macromodels for MEMS switches

• Aurel-Sorin Lup ^[1] ; Gabriela Ciuprina ^[1] ; Daniel Ioan ^[1] ; Anton Duca ^[1] ; Alexandra Nicoloiu ^[2] ; Dan Vasilache ^[2]
  1. [1] Polytechnic University of Bucharest

     Polytechnic University of Bucharest

     Sector 3, Rumanía

     
  2. [2] IMT-Bucharest, Bucharest, Romania
• Localización: Compel: International journal for computation and mathematics in electrical and electronic engineering, ISSN 0332-1649, Vol. 39, Nº 2, 2020, págs. 497-509
• Idioma: inglés
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• Resumen

  • The purpose of this paper is to propose a physics-aware algorithm to obtain radio frequency (RF)-reduced models of micro-electromechanical systems (MEMS) switches and show how, together with multiphysics macromodels, they can be realized as circuits that include both lumped and distributed parameters