Infrared response of vanadium oxide (VOx)/SiNx/reduced graphene oxide (rGO) composite microbolometer

• Autores: Zheng-Yuan Wu, Shiang-Feng Tang, Hong-Yuan Zeng, Wen-Jen Lin, Tzu-Chiang Chen, Yau-Tang Gau
• Localización: Microelectronics reliability, ISSN 0026-2714, Nº. 91-2, 2018, págs. 313-318
• Idioma: inglés
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• Resumen

  • Much attention has been paid to the photoresponse of vanaduim oxide (VOx) and amorphous silicon based microbolometer for long-wavelength infrared detection under un-cooled operation condition in recent decades. However, the outstanding physical and chemical properties of graphene and reduced graphene oxide (rGO) stimulate their potential for use in light-sensitive applications. Much less attention has been paid to investigate the performance on long-wavelength infrared detection of microbolometer using reduced graphene oxide/SiNx/vanadium oxide composite films deposited on under room temperature operation. In the research, we have proposed the novel microbolometer based on VOx/SiNx/rGO composite films replace the as-deposited VOx based microbolometer. It is noted that such extraordinary properties (high responsivity: 18,130 V/W and low NETD: 43.32 mK) of the VOx/SiNx/rGO composite presented here encourage us to contemplate on this protocol for next generation optoelectronic device engineering for infrared detection.