Microsystem technology demands for advanced assembly facilities which can assemble complex microsystems consisting of many single components (i.e. hybrid microsystems). Therefore, it is necessary to introduce flexible, highly precise and fast microassembly methods. After introducing the microrobot-based microassembly desktop station that has been developed at the University of Karlsruhe, we present the control system of this station from the lower to the planning level. It comprises vision-based closed-loop control, a reconfigurable computer-array, execution planning and advanced assembly-planning algorithms tailored to the needs of the microassembly station.
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