Microfluidic-nanophotonic label-free biosensors for lab-on-a-chip applications

• Autores: Francisco J. Blanco Barro
• Directores de la Tesis: Laura Lechuga Gómez (dir. tes.), Jorge Elizalde García (codir. tes.)
• Lectura: En la Universidad Politécnica de Madrid ( España ) en 2007
• Idioma: español
• Tribunal Calificador de la Tesis: Fernando Cussó (presid.), Miguel Ángel Sánchez García (secret.), Valerio Pruneri (voc.), José Manuel Quero Reboul (voc.), Carlos Dominguez Horna (voc.)
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• Resumen

  • The advance of the microfluidic devices has opened a wide possibility to improve the sensitivity and selectivity of label-free biosensor devices and to reduce the cost of the manufacturing processes. These strategies have been developed into the concept of Lab-on-a-chip (LOC). The miniaturization of LOC devices allows the improvement of the overall performance of the analytical devices by minimizing the scale on which the analysis is performed. In addition, the possibility to integrate microelectronics, optoelectronic, micromechanical, and microfluidic components in the same manufacturing cycle opens the possibility to reduce the cost of the final device.

    Existing microfluidic technologies are based on fabrication process and materials which are not compatible with label-free biosensor devices. There is no microfluidic technology which allows the integration of biosensor devices in a truly portable LOC device. Furthermore, there is not investigation of label-free biosensing protocols inside microfluidic channels.

    In this thesis the research leading towards a Microfluidic-optical label-free biosensor as the first step to obtain a Lab-on-a-chip have been presented. Various aspects of such integrated devices have been addressed, starting with the development of a novel low temperature CMOS compatible wafer-bonding technology based on the SU-8 polymer. The research includes a detailed material and fabrication characterization studies. Using this novel bonding technology 3-D interconnected straight walls microchannels has been achieved. The microfluidic technology allows the hybrid integration and packaging of three-dimensional interconnected microchannels with different MEMS and CMOS substrates.

    The microfluidic technology has been integrated with silicon Mach-Zehnder Interferometer label-free biosensor devices. This technology allow us to obtain high quality 3D microfluidic interconnected networks aligned on top the biosensor devices. The development of fluidic