Resumen de An innovative application of double slider-crank mechanism in efficient of the scanning acoustic microscopy system
Van Hiep Pham, Jaeyeop Choi, Tan Hung Vo, Dinh Dat Vu, Sumin Park, Byeong il Lee, Junghwan Oh
This paper proposes an innovative application of double slider-crank mechanism, which is utilized to develop a fast scanning module (FSM) of the scanning acoustic microscopy (SAM) system for evaluating the quality of 12-inch silicon wafer, that is, WFSAM system. In this application, the slider displacement and velocity are two critical parameters that must be carefully calculated to ensure the WFSAM system operates properly. Based on the scanning requirements, the slider displacement and velocity were calculated to determine the operation parameters of WFSAM system. A custom sample with known dimensions was prepared to scan using WFSAM system, which validated the WFSAM capabilities in order to provide internal information with accurate measurement. The quality of two 12-inch silicon wafers was evaluated using the WFSAM system. Finally, the design process of slider-crank mechanism is illustrated by a flowchart, which is used to develop the FSM of SAM system for inspecting any sample size.
