CoSi2 formation with a thin Ti interlayer-Ti capping layer and Ti capping layer

• A. Abdul Aziz ^[1] ; C.O. Lim ^[1] ; Z. Hassan ^[1] ; Z. Jamal ^[2]
  1. [1] School of Physics, University Science Malaysia
  2. [2] School of Microelectronics Engineering, Northern Malaysia University College of Engineering
• Localización: Recent Advances in Multidisciplinary Applied Physics: Proceedings of the First International Meeting on Applied Physics (APHYS-2003) October 13-18th 2003, Badajoz, Spain / A. Méndez Vilas (dir.), Formatex Research Center (dir.), 2005, ISBN 978-0-08-044648-6, págs. 337-341
• Idioma: español
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