Pressurized microvalve with SMD-based activation to drive fluid in low-cost and autonomous MEMS

• G. Flores ^[1] ; F. Perdigones ^[1] ; J. M. Quero ^[1]
  1. [1] Universidad of Seville
• Localización: Proceedings of the 2013 Spanish Conference on Electron Devices / Héctor García (aut.), Helena Castán Lanaspa (aut.), 2013, ISBN 9781467346665
• Idioma: español
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• Resumen

  • This paper reports an inexpensive and simple method to impulse fluid in PCB-based Lab on a Chip (LOC) MEMS devices. This method consists on using pressurized SU-8 chambers, with membranes as cover. The membrane is burst thank to the increase of pressure in the chamber due to the increase of temperature, at constant volume. The increase of temperature is achieved supplying voltage to a Surface-Mounted-Device (SMD) resistor. This method is intended for fabricating autonomous and inexpensive LOC devices.