Resumen de Lubricious TiSi(V)N coatings for extreme temperature application deposited by Deep Oscillation Magnetron Sputtering (DOMS) mode

F. Fernandes, M.A Mekicha, J.C. Oliveira, Tibor Polgár, A. Cavaleiro

• Development of new self-lubricant coating systems with control of the lubricous species diffusion have enormous potential to be used in the protection of surfaces in components for machining. In the last years, vanadium rich coatings have been introduced as possible candidates for self-lubrication due to their optimum tribological properties. This work is devoted on the study of V additions on the morphology, structure and on the tribological properties of TiSiN films deposited by HiPIMS in Deep Oscillation Magnetron Sputtering (DOMS) mode. Two different peak powers were used on the deposition of coatings in order to produce films with different morphology. The tribological properties of coatings were evaluated at room temperature against Al2O3 balls on a pin-on-disc apparatus. Increasing of peak power showed to change the cross section morphology of films from columnar type to compact structure. V additions improved the tribological properties of TiSiN coatings.