Resumen de Association of MEMS technology with integrated optics: demonstration of active membrane in-situ read-out by monolithic integration of silicon-based Mach Zehnder interferometer
Silicon micromachining benefits from the small scale and the facility of integration with electronic circuits and sensors resulting in production of miniaturized and smart microsystems with moving parts. The dimensional scale of MEMS/MOEMS devices is immediately compatible with the size of Integrated Optics, and is appropriate to control or manipulate optical radiations. This technology is suitable to fabricate precision-defined optical components and offers a relative easy alignment procedures of optical parts. This paper examines the contribution of micromachined structures in the specific context of opto-mechanical sensors based on the Integrated Optical readout using a Mach-Zehnder interferometer, monolithically integrated on top of piezoelectrically and electrostatically actuated membranes.
