Thickness measurement by Laser interference

• Autores: Ziad T. Al-Dahan
• Localización: Atti della Fondazione Giorgio Ronchi, ISSN 0391-2051, Anno 66, Nº. 5, 2011, págs. 627-634
• Idioma: inglés
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• Resumen

  • An optical method for directly measuring the thickness of a thin film at many incident angles has been proposed, and confirmed experimentally by means of an equipment made on an experimental basis. Two methods are available: one can be used when an index of refraction of the film, a wavelength λ, and two successive angles of incidence at which the light intensity has minimum values are known (Method I). The other one can be used without knowing an index of refraction of the film, when three successive angles of incidence and a wavelength are known (Method II).