Electro-thermal Stimuli for MEMS Testing in FSBM Technology

• Autores: N. Dumas, F. Azaïs, L. Latorre, P. Nouet
• Localización: Journal of electronic testing: Theory and applications, ISSN 0923-8174, Nº. 2, 2006, págs. 189-198
• Idioma: inglés
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• Resumen

  • The development of low-cost go/no-go procedures for MEMS production testing is one of the main issues of MEMS manufacturability. In particular, the generation of low-cost test stimuli is a real challenge. In this paper, we investigate the generation of electrically-induced thermal stimuli to test electro-mechanical structures. Static, transient and harmonic responses are studied and it is demonstrated that they can be used for efficient detection and classification of several faulty devices.