Micro- and nano-electromechanical systems for [bio]molecular

• Autores: Joan Bausells Roigé
• Localización: Contributions to Science, ISSN-e 1575-6343, Vol. 3, Nº. 1, 2005, págs. 67-78
• Idioma: inglés
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• Resumen

  • Micro- and nano-mechanical structures fabricated by silicon micromachining technology can be used as transducing elements in [bio]chemical sensors. Cantilever beams with lengths in the tens of micrometers range and widths and thicknesses in the micrometer or submicrometer range are bent by forces in the range of intermolecular forces. The cantilever deflection can be detected by optical or electrical methods and converted to an electrical output. In this work we discuss the sensitivity and resolution of such electromechanical molecular detectors, and present various examples of existing developments and their application to [bio]molecular analysis.