Resumen de 3D electromagnetic simulation of a large diameter cylindrical surface wave excited plasma reactor

N. Ikhlef, M.R. Mékidèche, A. Kimouche, O. Leroy

• Purpose – This paper aims to deal with the electromagnetic simulation of a microwave discharge excited by a surface wave in a large diameter (12 cm) cylindrical plasma reactor. It seeks to focus both on the optimization of the power coupling in the discharge and on the discharge homogeneity.

  Design/methodology/approach – The CST microwave studio 3D commercial code was used, which solves Maxwell equations using the finite integration technique. The power coupling is investigated by studying the influence of a short‐circuit position, whereas the discharge homogeneity is investigated by studying the influence of the discharge diameter.

  Findings – A short‐circuit position was found for which the power coupling is perfectly optimised (reflected power around 1 per cent), and it is shown that the 12 cm diameter cylindrical reactor is multi‐mode at 2.45 GHz, with a dominant m=3 hexapolar mode.

  Research limitations/implications – The electromagnetic modelling of this reactor is a first step; now the plasma has to be taken into account. Research is in progress to develop a 2D fluid model of the plasma.

  Practical implications – The electromagnetic simulation of a plasma reactor turns out to be very useful for the optimization in terms of energy coupling and spatial homogeneity prediction.

  Originality/value – The results and a similar approach can be used for the conception of new plasma reactors.