J. A. Williams, D. F. Moore
págs. 54-60
Characterisation of a nanostepper driven optical shutter for application in free-space microoptics
J. Zawadzka
págs. 61-66
Precision MEMS flexure mount for a Littman tunable external cavity laser
W. Huang, R. R. A. Syms
págs. 67-76
Design and evaluation of a MEMS optical chopper for fibre optic applications
D. Uttamchandani, L. Li
págs. 77-84
Eximer laser micromachining with half-tone masks for the fabrication of 3-D microstructures
A. S. Holmes
págs. 85-92
págs. 93-103
Sacrifical layers for widely tunable capacitors
A. J. Gallant
págs. 104-109
págs. 110-120
In-process microsensor for ultraprecision machining
H. Hashizume, H. Yoshioka
págs. 121-126
Room temperature performance of submicron bismuth Hall probes
S. Johnston, D. Petit, D. Atkinson
págs. 127-130
Micro-nano actuators driven by polarised light
S. R. Elliott, M. Stuchlik, P. Krecmer
págs. 131-136
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